NATO advanced study institute on process and device modeling for integrated circuit design : Univesrite Catholique Louvain, july 19-29, 1977. : surface characterization C-V technique; surface characterization - weak inversion; ion implanted MOS transistors - depletion mode devices; short channels - scaled down MOSFER's; sos MOSFET's; CAD models of MOSFET's - Merckel, G. (NATO, 1977)