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810325m19819999nyua b 001 0 eng |
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|a 0122341015 (v. 1 : alk. paper)
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|a DLC
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|d DLC
|b hrv
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|a TK7874
|b .V56
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|a 621.395 s
|2 19
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|a VLSI electronics :
|b microstructure science /
|c edited by Norman G. Einspruch.
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| 260 |
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|a New York :
|b Academic Press,
|c 1981-c1993.
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| 300 |
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|a v. <1-19, 21-24> :
|b ill. ;
|c 24 cm.
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| 500 |
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|a Vols. 11-<16 > have imprint: Orlando : Academic Press; v. 17-<19, 21-24> : San Diego : Academic Press.
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|a Beginning with vol. 6, some vols. edited by Norman G. Einspruch with other editors.
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| 504 |
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|a Includes bibliographies and indexes.
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| 505 |
1 |
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|a v. 1-5. [without special titles] -- v. 6. Materials and process characterization -- v. 7. [without special title] -- v. 8. Plasma processing for VLSI -- v. 9. [without special title] -- v. 10. Surface and interface effects in VLSI -- v. 11. GaAs microelectronics -- v. 12. Silicon materials -- v. 13. Metal-semiconductor contacts and devices -- v. 14. VLSI design -- v. 15. VLSI metallization -- v. 16. Lithography for VLSI -- v. 17. VLSI in medicine -- v.18. Advanced MOS device physics -- 19. Advanced CMOS process technology -- v. 21. Beam processing technologies -- v. 22. VLSI reliability -- v. 23. Application specific integrated circuit (ASIC) technology -- v. 24. Heterostructures and quantum devices.
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|a Integrated circuits
|x Very large scale integration.
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|a Einspruch, Norman G.
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|b cbc
|c orignew
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|e ocip
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|g y-gencatlg
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