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20191114144941.0 |
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091014s2010 nyua b 001 0 eng d |
| 999 |
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|c 50689
|d 50689
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| 020 |
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|a 9780387095103 (hbk.)
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| 020 |
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|a 9780387095110 (ebk.)
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|a ITD
|c ITD
|d ITD
|d AU@
|d BWX
|d SINLB
|d YDXCP
|d MUU
|d DEBBG
|d GZQ
|d VRC
|d HR-ZaFER
|b hrv
|e ppiak
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| 041 |
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|a eng
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| 082 |
0 |
4 |
|a 621.381
|2 22
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| 100 |
1 |
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|a Adams, Thomas M.
|q (Thomas McDaniel)
|9 39884
|
| 245 |
1 |
0 |
|a Introductory MEMS :
|b fabrication and applications /
|c Thomas M. Adams, Richard A. Layton.
|
| 260 |
|
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|a New York :
|b Springer,
|c 2010.
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| 300 |
|
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|a xv, 444 str. :
|b ilustr. ;
|c 25 cm.
|
| 504 |
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|a Bibliografija nakon svakog poglavlja.
Index.
|
| 505 |
0 |
|
|a 1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
|
| 650 |
|
0 |
|a Microelectromechanical systems.
|9 39885
|
| 650 |
|
0 |
|a Electronic apparatus and appliances.
|9 36285
|
| 650 |
|
0 |
|a Transducers.
|9 39886
|
| 650 |
0 |
7 |
|a MEMS.
|2 swd
|9 39887
|
| 700 |
1 |
|
|a Layton, Richard A.
|c (Mechanical engineer)
|9 39888
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| 942 |
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|2 udc
|c K
|
