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|a HR-ZaIRB
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|c HR-ZaIRB
|e ppiak
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080 |
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|a 539.2
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111 |
2 |
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|4 aut
|a Silicon materials science and technology, proc. of the int. symp.
|c Montreal)
|d 7-11 May 1990 ;
|n (sixth ;
|
245 |
1 |
0 |
|a Semiconductor silicon 1990 /
|c edited by Howard R. Huff, Keith G. Barraclough, Jun-ichi Chikawa.
|
260 |
|
|
|a Pennington, N.J. :
|b Electrochemical Society,
|c 1990.
|
300 |
|
|
|a xix, 1090 str. :
|b ilustr. ;
|c 23 cm.
|
490 |
1 |
|
|a Proceedings Volume 90-7
|
653 |
|
|
|a ULSI
|a thin films
|
700 |
1 |
|
|4 edt
|a Huff, Howard R.
|
830 |
|
0 |
|a Proceedings Volume 90-7
|
942 |
|
|
|c BOOK
|
960 |
|
|
|a Pivac, Branko
|c Algoritam 422-376-93
|
999 |
|
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|c 1087
|d 1087
|