Impurity diffusion and gettering in silicon
| Permalink: | http://skupni.nsk.hr/Record/irb.0009326 |
|---|---|
| Ostali autori: | Symposium on impurity diffusion and gettering in silicon (Author) |
| Ostali autori: | Fair, Richard B. (Editor) |
| Vrsta građe: | Knjiga |
| Jezik: | eng |
| Impresum: |
Pittsburgh :
Materials Research Society,
1985.
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| Nakladnička cjelina: |
Materials Research Society Symposia Proceedings ;
vol. 36 |