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060914s1987 -usa |||||||||||||eng d |
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|a HR-ZaIRB
|b hrv
|c HR-ZaIRB
|e ppiak
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| 080 |
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|a 621.3
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| 111 |
2 |
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|4 aut
|a Symposium on Silicon nitride and silicon dioxide thin insulating films
|c San Diego)
|d 1986 ;
|n (2nd ;
|
| 245 |
1 |
0 |
|a Proceedings of the symposium on Silicon nitride and silicon dioxide thin insulating films /
|c edited by Vik J. Kapoor, Kevin T. Hankins ; Electronics and dielectrics and insulation divisions.
|
| 260 |
|
|
|a Pennington :
|b Electrochemical Society,
|c cop. 1987.
|
| 300 |
|
|
|a X, 550 str. :
|b ilustr. ;
|c 23 cm.
|
| 490 |
1 |
|
|a Proceedings ;
|v vol. 87-10
|
| 504 |
|
|
|a Bibliografija.
|
| 653 |
|
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|a electroncs
|a silicon nitride
|a silicon dioxide thin insulating films
|
| 700 |
1 |
|
|4 edt
|a Kapoor, Vik J.
|
| 700 |
1 |
|
|4 edt
|a Hankins, Kevin T.
|
| 830 |
|
0 |
|a Proceedings ;
|v vol. 87-10
|
| 942 |
|
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|c BOOK
|
| 960 |
|
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|a Pivac, Branko
|
| 998 |
|
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|c Gavranović, Drahomira
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| 999 |
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|c 18612
|d 18612
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