Monte Carlo simulation of radio frequency plasmas in O2
Summary: The use of radio frequency (RF) driven discharges in many fields, including material processing, microelectronics and aerospace industry, necessitates development of effective numerical predictive tools to understand and design their behaviour. The structure of RF discharges in O2 is examin...
| Permalink: | http://skupni.nsk.hr/Record/nsk.NSK01000718581 |
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| Matična publikacija: |
Fizika A (Zagreb) 17 (2008), 1/4 ; str. 35-50 |
| Glavni autor: | Settaouti, L. (-) |
| Ostali autori: | Settaouti, A. (-) |
| Vrsta građe: | Članak |
| Jezik: | eng |
| Predmet: | |
| Online pristup: |
FIZIKA A |