Characterization and metrology for ULSI technology
| Permalink: | http://skupni.nsk.hr/Record/fer.KOHA-OAI-FER:35331 |
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| Ostali autor: | International Conference on Characterization and Metrology for ULSI Technology (-), National Institute of Standards and Technology (U.S.) |
| Ostali autori: | Seiler, David G. (-) |
| Vrsta građe: | Knjiga |
| Jezik: | eng |
| Impresum: |
Melville, N.Y. :
American Institute of Physics,
2005.
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| Nakladnička cjelina: |
AIP conference proceedings ;
no.788. |
| Predmet: | |
| Online pristup: |
Publisher description |