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050804s2005 nyua b 101 0 eng |
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|a 2005931820
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|a 621.39/5
|2 22
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| 111 |
2 |
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|a International Conference on Characterization and Metrology for ULSI Technology
|d (2005 :
|c Richardson, Tex.)
|
| 245 |
1 |
0 |
|a Characterization and metrology for ULSI technology /
|c editors, David G. Seiler ... [et al.]
|
| 260 |
|
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|a Melville, N.Y. :
|b American Institute of Physics,
|c 2005.
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| 300 |
|
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|a xx, 667 p. :
|b ill. ;
|c 28 cm. +
|e 1 CD-ROM (4 3/4 in.)
|
| 490 |
1 |
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|a AIP conference proceedings,
|x 0094-243X ;
|v v. 788
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Integrated circuits
|x Ultra large scale integration
|v Congresses.
|
| 650 |
|
0 |
|a Integrated circuits
|x Ultra large scale integration
|v Congresses
|v Software.
|
| 700 |
1 |
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|a Seiler, David G.
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| 710 |
2 |
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|a National Institute of Standards and Technology (U.S.)
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| 830 |
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0 |
|a AIP conference proceedings ;
|v no.788.
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| 856 |
4 |
2 |
|3 Publisher description
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|a jp00 2006-06-19
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