Plasma etching

Permalink: http://skupni.nsk.hr/Record/irb.0000551
Ostali autori: Manos, Dennis M. (Editor)
Vrsta građe: Knjiga
Jezik: eng
Impresum: Boston [etc.] : Academic Press, [1989].
Nakladnička cjelina: Plasma-Materials Interactions / A Series edited by Orlando Auciello, Daniel L. Flamm
Predmet: