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20110517105304.0 |
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900508s1989 -usa |||||||||||||eng d |
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|a 0124693709
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035 |
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|z 797
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|a HR-ZaIRB
|b hrv
|c HR-ZaIRB
|e ppiak
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080 |
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|a 533.9
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245 |
0 |
0 |
|a Plasma etching :
|b an introduction /
|c edited by Dennis M. Manos, Daniel L. Flamm.
|
260 |
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|a Boston [etc.] :
|b Academic Press,
|c [1989].
|
300 |
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|a XII, 476 str. :
|b ilustr. ;
|c 24 cm.
|
490 |
1 |
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|a Plasma-Materials Interactions / A Series edited by Orlando Auciello, Daniel L. Flamm
|
504 |
|
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|a includes index.
|
653 |
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|a materials interactions
|
700 |
1 |
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|4 edt
|a Manos, Dennis M.
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830 |
|
0 |
|a Plasma-Materials Interactions / A Series edited by Orlando Auciello, Daniel L. Flamm
|
942 |
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|c BOOK
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960 |
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|a Radić, Nikola
|c Mladost 21422463
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999 |
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|c 583
|d 583
|