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|a HR-ZaIRB
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|a 621.38
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| 111 |
2 |
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|4 aut
|a International symposium on ULSI science and technology
|c Washington, DC)
|d 1991 ;
|n (3 ;
|
| 245 |
1 |
0 |
|a ULSI science and technology 1991 /
|c edited by John M. Andrews, George K. Celler.
|
| 260 |
|
|
|a Pennington, NJ :
|b The Electrochemical Society,
|c 1991.
|
| 300 |
|
|
|a XV, 924 str. :
|b ilustr. ;
|c 23 cm.
|
| 490 |
1 |
|
|a Proceedings ;
|v vol. 91-11
|
| 504 |
|
|
|a Kazalo.
|
| 653 |
|
|
|a dielectric science
|a ultra large scale integration
|
| 700 |
1 |
|
|4 edt
|a Andrews, John M.
|
| 830 |
|
0 |
|a Proceedings ;
|v vol. 91-11
|
| 942 |
|
|
|c BOOK
|
| 960 |
|
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|a Pivac, Branko
|c Tamaris 299/92
|
| 999 |
|
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|c 975
|d 975
|