Low temperature deposition of SiNx thin films by the LPCVD method
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| Matična publikacija: |
Croatica chemica acta 85 (2012) 1 ; str. 97-100 |
| Glavni autor: | Tijanić, Zdenko (-) |
| Ostali autori: | Ristić, Davor (-), Ivanda, Mile, inženjer fizike, Bogdanović-Radović, Ivančica, Marciuš, Marijan, Ristić, Mira, Gamulin, Ozren, Musić, Svetozar, Furić, Krešimir, Chiasera, Alessandro, Ferrari, Maurizio, Righini, Giancarlo Cesare |
| Vrsta građe: | Članak |
| Jezik: | eng |
| Predmet: | |
| Online pristup: |
Elektronička verzija članka |
APA stil citiranja
Tijanić, Z., Ristić, D., Ivanda, M., Bogdanović-Radović, I., Marciuš, M., Ristić, M., . . . Righini, G. C. (2012). Low temperature deposition of SiNx thin films by the LPCVD method: Low temperature deposition of SiNx thin films by the LPCVD method. Croatica chemica acta, p. 5.
Chicago stil citiranjaTijanić, Zdenko, et al. "Low temperature deposition of SiNx thin films by the LPCVD method: Low temperature deposition of SiNx thin films by the LPCVD method." 2012: 5.
MLA stil citiranjaTijanić, Zdenko, et al. "Low temperature deposition of SiNx thin films by the LPCVD method: Low temperature deposition of SiNx thin films by the LPCVD method." 2012: 5.